Electrochromism of DC magnetron sputtered TiO2 thin films: Role of deposition parameters

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dc.authoridNiklasson, Gunnar/0000-0002-8279-5163
dc.authoridSORAR, IDRIS/0000-0002-1082-7576
dc.contributor.authorSorar, Idris
dc.contributor.authorPehlivan, Esat
dc.contributor.authorNiklasson, Gunnar A.
dc.contributor.authorGranqvist, Claes G.
dc.date.accessioned2024-09-18T20:16:44Z
dc.date.available2024-09-18T20:16:44Z
dc.date.issued2013
dc.departmentHatay Mustafa Kemal Üniversitesien_US
dc.description.abstractWe performed a comprehensive study on the electrochromism in TiO2 thin films made by reactive DC magnetron sputtering and elucidated the roles of sputter gas pressure p, O-2/Ar gas ratio gamma and substrate temperature tau(s). Good mid-luminous optical modulation taken to be similar to 50% in similar to 200-nm-thick films was obtained under charge exchange in a Li+ electrolyte for p > 15 mTorr and tau(s) < 100 degrees C, whereas gamma was less important. The deposition rate dropped for increasing p, and hence p approximate to 15 mTorr was optimal. These films were X-ray amorphous and contained some water. The coloration efficiency eta was 25 cm(2)/C, which exceeds data on eta in most prior studies on sputter deposited TiO2 and verifies that such films can display the same values of eta as those of TiO2 films made by several chemical techniques. (C) 2013 Elsevier B.V. All rights reserved.en_US
dc.description.sponsorshipScientific and Technological Research Council of Turkey (TUBITAK); Swedish Research Councilen_US
dc.description.sponsorshipThis research was supported by the Scientific and Technological Research Council of Turkey (TUBITAK) and the Swedish Research Council.en_US
dc.identifier.doi10.1016/j.solmat.2013.03.035
dc.identifier.endpage180en_US
dc.identifier.issn0927-0248
dc.identifier.issn1879-3398
dc.identifier.scopus2-s2.0-84877318850en_US
dc.identifier.scopusqualityQ1en_US
dc.identifier.startpage172en_US
dc.identifier.urihttps://doi.org/10.1016/j.solmat.2013.03.035
dc.identifier.urihttps://hdl.handle.net/20.500.12483/9721
dc.identifier.volume115en_US
dc.identifier.wosWOS:000320681700025en_US
dc.identifier.wosqualityQ1en_US
dc.indekslendigikaynakWeb of Scienceen_US
dc.indekslendigikaynakScopusen_US
dc.language.isoenen_US
dc.publisherElsevieren_US
dc.relation.ispartofSolar Energy Materials and Solar Cellsen_US
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanıen_US
dc.rightsinfo:eu-repo/semantics/openAccessen_US
dc.subjectElectrochromismen_US
dc.subjectThin filmsen_US
dc.subjectTitanium dioxideen_US
dc.subjectSputter depositionen_US
dc.subjectDeposition parametersen_US
dc.titleElectrochromism of DC magnetron sputtered TiO2 thin films: Role of deposition parametersen_US
dc.typeArticleen_US

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