The role of heat treatment on the structural and nano-mechanical properties of SmCo5 thin films grown by RF magnetron sputtering technique

Basit Öğe Kaydı
dc.authorid, mehmet/0000-0001-6030-0791
dc.contributor.authorKuru, M.
dc.contributor.authorOzmetin, A. E.
dc.contributor.authorOzmetin, A.
dc.contributor.authorSahin, O.
dc.date.accessioned2024-09-18T20:57:06Z
dc.date.available2024-09-18T20:57:06Z
dc.date.issued2017
dc.departmentHatay Mustafa Kemal Üniversitesien_US
dc.description.abstractIn this study, the influence of annealing temperature on structural, morphological, and nano-mechanical properties of SmCo5 thin films, which was produced by RF magnetron sputtering technique, was investigated. A set of 1 mu m thick SmCo5 thin films were grown on a Si (100) substrate at room temperature, and subsequently annealed at 400 degrees C, 500 degrees C, 600 degrees C, and 700 degrees C in an argon atmosphere. These films have a hexagonal CaCu5 structure with (110) preferential orientation corresponding to SmCo5 films observed. The Structural morphological and nano-mechanical properties of SmCo5 thin films were examined using the Grazing Incident X-ray Diffraction (GIXRD), Atomic Force Microscopy (AFM), Scanning Electron Microscopy (SEM) and Nano indentation techniques. Results showed that the as-deposited SmCo5 thin films had a polycrystalline structure. Following the heat treatment, both crystallite and grain size increased and thin film crystallinity improved. In addition, nano-hardness and reduced elastic modulus of the SmCo5 thin films were measured with a Berkovich tip. Nano hardness and reduced elastic modulus values decrease with the increasing annealing temperature.en_US
dc.description.sponsorshipScientific Research Commission of Mustafa Kemal University [15800]; Turkish State Planning Organization (DPT) Project [2010K121220]en_US
dc.description.sponsorshipThis work is in part supported by the Scientific Research Commission of Mustafa Kemal University (Project no: 15800) and Turkish State Planning Organization (DPT) Project no: 2010K121220. Authors thank Dr. D. G. Naugle and Dr. D. Rathnayaka for their technical support.en_US
dc.identifier.doi10.1016/j.ceramint.2016.12.059
dc.identifier.endpage3899en_US
dc.identifier.issn0272-8842
dc.identifier.issn1873-3956
dc.identifier.issue4en_US
dc.identifier.scopus2-s2.0-85007135378en_US
dc.identifier.scopusqualityQ1en_US
dc.identifier.startpage3893en_US
dc.identifier.urihttps://doi.org/10.1016/j.ceramint.2016.12.059
dc.identifier.urihttps://hdl.handle.net/20.500.12483/12288
dc.identifier.volume43en_US
dc.identifier.wosWOS:000393937900060en_US
dc.identifier.wosqualityQ1en_US
dc.indekslendigikaynakWeb of Scienceen_US
dc.indekslendigikaynakScopusen_US
dc.language.isoenen_US
dc.publisherElsevier Sci Ltden_US
dc.relation.ispartofCeramics Internationalen_US
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanıen_US
dc.rightsinfo:eu-repo/semantics/closedAccessen_US
dc.subjectSmCo5 thin filmsen_US
dc.subjectNanoindentationen_US
dc.subjectAFMen_US
dc.subjectSEMen_US
dc.subjectXRDen_US
dc.titleThe role of heat treatment on the structural and nano-mechanical properties of SmCo5 thin films grown by RF magnetron sputtering techniqueen_US
dc.typeArticleen_US

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