Mechanical characterization of MgB2 thin films using nanoindentation technique

Basit Öğe Kaydı
dc.authorid, mehmet/0000-0001-6030-0791
dc.contributor.authorOzmetin, A. E.
dc.contributor.authorSahin, O.
dc.contributor.authorOngun, E.
dc.contributor.authorKuru, M.
dc.date.accessioned2024-09-18T20:32:50Z
dc.date.available2024-09-18T20:32:50Z
dc.date.issued2015
dc.departmentHatay Mustafa Kemal Üniversitesien_US
dc.description.abstractMechanical properties of MgB2 thin films deposited by RF magnetron sputtering technique have been studied. MgB2 thin films were deposited approximately 300 nm on Si substrate above room temperature, and the thin films were subsequently annealed. Great care has been taken to reduce O-2 in the chamber during deposition. Structural and mechanical properties of MgB2 thin films were investigated using the Scanning Electron Microscopy (SEM), X-ray diffraction (XRD) and nanoindentation techniques. Unloading segments of nanoindentation curves analyzed using Oliver-Pharr method. Both reduced elastic modulus and nanohardness values show load dependence, i.e., indentation size effect (ISE). Proportional specimen resistance (PSR) model was used to calculate the load independent nanohardness value. Load-independent hardness value was calculated using the proportional specimen resistance (PSR) model. XRD and SEM results show that the MgB2 thin films have fine grain size. Nanoindentation results show that hardness and elastic modulus values were 11.72 GPa and 178.13 GPa, respectively. (C) 2014 Elsevier B.V. All rights reserved.en_US
dc.description.sponsorshipScientific and Technological Research Council of Turkey (TUBITAK) [112M199]; Turkish State Planning Organization (DPT) [2010K121220]en_US
dc.description.sponsorshipThis work was supported by the Scientific and Technological Research Council of Turkey (TUBITAK) with Grant No. 112M199, and the Turkish State Planning Organization (DPT) with project no. 2010K121220.en_US
dc.identifier.doi10.1016/j.jallcom.2014.09.015
dc.identifier.endpage266en_US
dc.identifier.issn0925-8388
dc.identifier.issn1873-4669
dc.identifier.scopus2-s2.0-84907584656en_US
dc.identifier.scopusqualityQ1en_US
dc.identifier.startpage262en_US
dc.identifier.urihttps://doi.org/10.1016/j.jallcom.2014.09.015
dc.identifier.urihttps://hdl.handle.net/20.500.12483/11159
dc.identifier.volume619en_US
dc.identifier.wosWOS:000344429000040en_US
dc.identifier.wosqualityQ1en_US
dc.indekslendigikaynakWeb of Scienceen_US
dc.indekslendigikaynakScopusen_US
dc.language.isoenen_US
dc.publisherElsevier Science Saen_US
dc.relation.ispartofJournal of Alloys and Compoundsen_US
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanıen_US
dc.rightsinfo:eu-repo/semantics/closedAccessen_US
dc.subjectMgB2 thin filmsen_US
dc.subjectNanoindentationen_US
dc.subjectMechanical characterizationen_US
dc.subjectMagnetron sputteringen_US
dc.titleMechanical characterization of MgB2 thin films using nanoindentation techniqueen_US
dc.typeArticleen_US

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